Large-scale electron beam evaporation optical coating equipment for pvd coating machine

1. Vacuum system (Basic guarantee for coating) Vacuum chamber Vacuum pump set Vacuum measurement and control.
2. Electron gun system (Energy supply core) Electron emission source Focusing and deflection device Power control module.
3. Evaporation deposition System (Key to film formation) Crucible assembly; Target material fixing device Film thickness monitoring and control Core sensor.
4. Control System (Automation and Precision Assurance) Main control unit Closed-loop control module Safety protection system.
5. Substrate treatment system (Enhancing Film Adhesion) Substrate support and rotating mechanism; Substrate heating device Ion bombardment pretreatment module (optional).
6. Auxiliary system Cooling system; Gas control system.

The core principle of the high-precision electron beam evaporation coating machine is the physical process of "converting the energy of the electron beam into the thermal energy of the target material to achieve material evaporation - gas-phase transfer - substrate deposition".

1. The coating precision is extremely high and the film layer quality is excellent
2. It has a wide range of applicable materials

   A variety of materials such as evaporable metals (Au, Ag, Al, Ti), alloys (NiCr, TiW), oxides (SiO₂, TiO₂, Al₂O₃), sulfides (ZnS), and ceramics.

3. High evaporation efficiency and strong film layer adhesion
4. Low pollution and high utilization rate of target materials
5. High degree of automation and convenient operation

1. Optical field (Core application scenarios)
   • Optical lenses: Anti-reflection films (such as SiO₂-TiO₂ multilayer films), high-reflection films (such as Al+SiO₂ protective films), and filter films (such as infrared filter films, ultraviolet cut-off films) are coated on lenses, prisms, and mirrors to enhance the light transmittance, reflectance, or spectral selectivity of optical devices.
   • Display devices: Coating transparent conductive films (such as ITO, AZO), anti-reflective films, and touch sensing films on the glass substrates of LCD, OLED, and Micro LED displays.
   • Laser devices: High-reflection and anti-reflection films are coated on the laser resonant cavity and the end face of the optical fiber to optimize the laser transmission efficiency.
2. Electronics and semiconductors field
   • Semiconductor devices: Metal electrodes (such as Au, Al, Ti) and passivation films (such as SiO₂, Si₃N₄) are coated on chips and wafers to ensure the conductivity and stability of the devices.
   • Electronic components: Coating functional film layers (such as NiCr resistance film, Ta₂O₅ dielectric film) on capacitors, resistors, and sensors to enhance component performance;
   • Magnetic storage devices: Coating magnetic films (such as CoCrPt alloy films) on hard disk heads and magnetic tapes to enhance storage capacity and read/write speed.
3. Aerospace and national defense fields
   • Aerospace components: Coating wear-resistant, corrosion-resistant and UV-resistant film layers for aircraft Windows and satellite optical lenses; Coat the missile seeker with infrared anti-reflection film and stealth film;
   • National defense equipment: Coating high-performance optical film layers for laser weapons and infrared detectors to enhance the environmental adaptability and combat performance of the equipment.
4. Other high-end fields
   • Medical devices: Coating optical film layers with good biocompatibility and disinfection resistance for artificial lenses and endoscope lenses;
   • Decorative and functional coating: Coating high-end watch dials and jewelry with wear-resistant and anti-oxidation decorative films (such as TiN gold film, Cr black film); Hard protective films (such as TiN and TiAlN) are coated on cutting tools and molds to extend their service life.